Inventor

CHANG SHENG-YUEH

TW6 patents

⚠️ This page may combine multiple inventors who share the name “CHANG SHENG-YUEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IND TECH RES INST

4 patents

US6207779B1Mar 27, 2001

Ring-opened polymer

IND TECH RES INST17 citations80

US6303725B1Oct 16, 2001

Cyclic dione polymer

IND TECH RES INST11 citations72

US6538086B1Mar 25, 2003

Polymer with a pericyclic protective group and resist composition containing the same

IND TECH RES INST2 citations61

US6573024B2Jun 3, 2003

Ammonium salt of organic acid and resist composition containing the same

IND TECH RES INST2 citations57

UNITED MICROELECTRONICS CORP

1 patent

US6417096B1Jul 9, 2002

Method for avoiding photo residue in dual damascene with acid treatment

UNITED MICROELECTRONICS CORP12 citations72

IND TECHNOLOGY RES INST EVERLI

1 patent

US6197476B1Mar 6, 2001

Photosensitive composition containing a cyclic dione polymer

IND TECHNOLOGY RES INST EVERLI3 citations55