Inventor
NGUYEN THOMAS D
US6 patents
Patents
6 patentsUS6090304AJul 18, 2000
Methods for selective plasma etch
LAM RES CORP104 citations94
US6117786ASep 12, 2000
Method for etching silicon dioxide using fluorocarbon gas chemistry
LAM RES CORP63 citations92
US6410451B2Jun 25, 2002
Techniques for improving etching in a plasma processing chamber
LAM RES CORP26 citations91
US6899109B1May 31, 2005
Method and apparatus for reducing He backside faults during wafer processing
LAM RES CORP16 citations90
US6733594B2May 11, 2004
Method and apparatus for reducing He backside faults during wafer processing
LAM RES CORP20 citations90
US6217786B1Apr 17, 2001
Mechanism for bow reduction and critical dimension control in etching silicon dioxide using hydrogen-containing additive gases in fluorocarbon gas chemistry
LAM RES CORP36 citations90