Inventor
MUELLER GEORGE
US5 patents
⚠️ This page may combine multiple inventors who share the name “MUELLER GEORGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS6178919B1Jan 30, 2001
Perforated plasma confinement ring in plasma reactors
LAM RES CORP208 citations97
US6506685B2Jan 14, 2003
Perforated plasma confinement ring in plasma reactors
LAM RES CORP64 citations95
US6117786ASep 12, 2000
Method for etching silicon dioxide using fluorocarbon gas chemistry
LAM RES CORP63 citations92
US6410451B2Jun 25, 2002
Techniques for improving etching in a plasma processing chamber
LAM RES CORP26 citations91