Inventor · disambiguated record
Sadanori Shimura
Also filed as: SHIMURA SADANORI
4 granted patents·800 citations·filing 1998–2000
84Inventor score
Files withNGK INSULATORS LTD4
Top patents by PatentIndex Score
4 records- 0198US6239402B1Aluminum nitride-based sintered bodies, corrosion-resistant members, metal-buried articles and semiconductor-holding apparatusesNGK INSULATORS LTD·Filed 1999·Granted May 29, 2001·357 cites·13 claims
- 0298US6139983ACorrosion-resistant member, wafer-supporting member, and method of manufacturing the sameNGK INSULATORS LTD·Filed 1998·Granted Oct 31, 2000·370 cites·4 claims
- 0386US6632549B1Corrosion-resistant member, wafer-supporting member, and method of manufacturing the sameNGK INSULATORS LTD·Filed 2000·Granted Oct 14, 2003·57 cites·8 claims
- 0476US6562183B1Anti-corrosive parts for etching apparatusNGK INSULATORS LTD·Filed 2000·Granted May 13, 2003·16 cites·15 claims
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