Inventor
LIU SEONG-HO
KR3 patents
Patents
3 patentsUS6498092B2Dec 24, 2002
Method of making a semiconductor device having dual damascene line structure using a patterned etching stopper
SAMSUNG ELECTRONICS CO LTD27 citations90
US7220652B2May 22, 2007
Metal-insulator-metal capacitor and interconnecting structure
SAMSUNG ELECTRONICS CO LTD11 citations82
US6746951B2Jun 8, 2004
Bond pad of semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD13 citations81