Inventor
ARITA KOUJI
JP3 patents
Patents
3 patentsUS7420279B2Sep 2, 2008
Carbon containing silicon oxide film having high ashing tolerance and adhesion
NEC ELECTRONICS CORP13 citations81
US7102236B2Sep 5, 2006
Carbon containing silicon oxide film having high ashing tolerance and adhesion
NEC ELECTRONICS CORP6 citations70
US7582970B2Sep 1, 2009
Carbon containing silicon oxide film having high ashing tolerance and adhesion
NEC ELECTRONICS CORP0 citations47