Inventor

ROTERS GEORG

DE7 patents

⚠️ This page may combine multiple inventors who share the name “ROTERS GEORG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON THERMAL PRODUCTS GMBH

2 patents

US7151060B2Dec 19, 2006

Device and method for thermally treating semiconductor wafers

MATTSON THERMAL PRODUCTS GMBH4 citations58

US7144747B2Dec 5, 2006

Method for thermally treating a substrate that comprises several layers

MATTSON THERMAL PRODUCTS GMBH1 citations47

(unassigned)

1 patent

US5935650AAug 10, 1999

Method of oxidation of semiconductor wafers in a rapid thermal processing (RTP) system

22 citations85

PEUSE BRUCE W

1 patent

US8236706B2Aug 7, 2012

Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures

PEUSE BRUCE W14 citations78

MATTSON THERMAL PRODUCTS

1 patent

US7144826B2Dec 5, 2006

Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment

MATTSON THERMAL PRODUCTS15 citations75

MATTSON TECH INC

1 patent

US7101812B2Sep 5, 2006

Method of forming and/or modifying a dielectric film on a semiconductor surface

MATTSON TECH INC10 citations68

INFINEON TECHNOLOGIES AG

1 patent

US7094637B2Aug 22, 2006

Method for minimizing the vapor deposition of tungsten oxide during the selective side wall oxidation of tungsten-silicon gates

INFINEON TECHNOLOGIES AG2 citations58