Inventor

FRIGGE STEFFEN

DE3 patents

⚠️ This page may combine multiple inventors who share the name “FRIGGE STEFFEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

1 patent

US7704898B2Apr 27, 2010

Method for the thermal treatment of disk-shaped substrates

MATTSON TECH INC15 citations79

MATTSON THERMAL PRODUCTS GMBH

1 patent

US7151060B2Dec 19, 2006

Device and method for thermally treating semiconductor wafers

MATTSON THERMAL PRODUCTS GMBH4 citations58

INFINEON TECHNOLOGIES AG

1 patent

US7094637B2Aug 22, 2006

Method for minimizing the vapor deposition of tungsten oxide during the selective side wall oxidation of tungsten-silicon gates

INFINEON TECHNOLOGIES AG2 citations58