Inventor

KIMATA YOSHINORI

JP2 patents

Patents

2 patents

US7740822B2Jun 22, 2010

Method for purification of disilicon hexachloride and high purity disilicon hexachloride

TOAGOSEI CO LTD2 citations58

US7193213B2Mar 20, 2007

Method for measurement of silanol group concentration and cell for measurement

TOAGOSEI CO LTD0 citations38