Inventor
SHIN KOUNG-SU
KR5 patents
Patents
5 patentsUS6815236B2Nov 9, 2004
Method of measuring a concentration of a material and method of measuring a concentration of a dopant of a semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations62
US7280233B2Oct 9, 2007
Method and apparatus for inspecting an edge exposure area of a wafer
SAMSUNG ELECTRONICS CO LTD4 citations61
US7274471B2Sep 25, 2007
Systems and methods for measuring distance of semiconductor patterns
SAMSUNG ELECTRONICS CO LTD2 citations61
US7601555B2Oct 13, 2009
Wafer inspection system and method thereof
SAMSUNG ELECTRONICS CO LTD6 citations57
US7646478B2Jan 12, 2010
Apparatus and method for examining spectral characteristics of transmitted light through an object
SAMSUNG ELECTRONICS CO LTD0 citations49