Inventor
DE HOON CORNELIUS ADRIANUS LAMBERTUS
NL20 patents
⚠️ This page may combine multiple inventors who share the name “DE HOON CORNELIUS ADRIANUS LAMBERTUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS7538273B2May 26, 2009
Cable connection to decrease the passing on of vibrations from a first object to a second object
ASML NETHERLANDS BV8 citations82
US10578983B2Mar 3, 2020
Lithographic apparatus having an active base frame support
ASML NETHERLANDS BV2 citations68
US9977349B2May 22, 2018
Support device, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations65
US11561479B2Jan 24, 2023
Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US11422477B2Aug 23, 2022
Vibration isolation system and lithographic apparatus
ASML NETHERLANDS BV0 citations57
US10649347B2May 12, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations57
US11269262B2Mar 8, 2022
Frame assembly, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US11169450B2Nov 9, 2021
Pneumatic support device and lithographic apparatus with pneumatic support device
ASML NETHERLANDS BV0 citations48
US10816910B2Oct 27, 2020
Vibration isolator, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations47
US10409175B2Sep 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations38
US10503086B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations37
BUTLER HANS
7 patentsUS8164737B2Apr 24, 2012
Lithographic apparatus having an active damping subassembly
BUTLER HANS11 citations82
US9715171B2Jul 25, 2017
Imprint lithographic apparatus and imprint lithographic method
BUTLER HANS4 citations71
US8994919B2Mar 31, 2015
Lithographic apparatus and device manufacturing method
BUTLER HANS2 citations62
US8245824B2Aug 21, 2012
Combination of structure and an active damping system, and a lithographic apparatus
BUTLER HANS4 citations60
US8059259B2Nov 15, 2011
Damping arrangement, active damping system, lithographic apparatus, and projection assembly
BUTLER HANS6 citations60
US8743344B2Jun 3, 2014
Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object
BUTLER HANS1 citations50
US8781775B2Jul 15, 2014
Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus
BUTLER HANS0 citations41