Inventor
OHSHITA KYOKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “OHSHITA KYOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
5 patentsUS7776510B2Aug 17, 2010
Resist composition, method of forming resist pattern, compound and acid generator
TOKYO OHKA KOGYO CO LTD14 citations83
US7488568B2Feb 10, 2009
Resist composition, method of forming resist pattern, compound and acid generator
TOKYO OHKA KOGYO CO LTD7 citations73
US7955777B2Jun 7, 2011
Compound, acid generator, resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD4 citations62
US7741009B2Jun 22, 2010
Positive resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations61
US7745098B2Jun 29, 2010
Polymer compound, positive resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
UTSUMI YOSHIYUKI
2 patentsHADA HIDEO
2 patentsUS9034556B2May 19, 2015
Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern
HADA HIDEO2 citations60
US9040220B2May 26, 2015
Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern
HADA HIDEO0 citations50