Inventor
THOMAS TIMOTHY S
US5 patents
⚠️ This page may combine multiple inventors who share the name “THOMAS TIMOTHY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS11469084B2Oct 11, 2022
High temperature RF connection with integral thermal choke
LAM RES CORP6 citations83
US12243725B2Mar 4, 2025
High temperature RF connection with integral thermal choke
LAM RES CORP1 citations61
US11232966B2Jan 25, 2022
Electrostatic chucking pedestal with substrate backside purging and thermal sinking
LAM RES CORP1 citations60