Inventor

KAWAHARA TOSHIKAZU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “KAWAHARA TOSHIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

1 patent

US9211629B2Dec 15, 2015

Polishing apparatus

EBARA CORP4 citations66

MIYAMOTO ATSUSHI

1 patent

US9057873B2Jun 16, 2015

Global alignment using multiple alignment pattern candidates

MIYAMOTO ATSUSHI2 citations59

FUJITA HIROMI

1 patent

US8189040B2May 29, 2012

Recipe generation system and method

FUJITA HIROMI3 citations54

HITACHI HIGH TECH CORP

1 patent

US10984143B2Apr 20, 2021

Recipe creation device for use in semiconductor measurement device or semiconductor inspection device

HITACHI HIGH TECH CORP0 citations47