Inventor

SUKEGAWA SHIGEKI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “SUKEGAWA SHIGEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

2 patents

US10984143B2Apr 20, 2021

Recipe creation device for use in semiconductor measurement device or semiconductor inspection device

HITACHI HIGH TECH CORP0 citations47

US7834316B2Nov 16, 2010

Method for adjusting imaging magnification and charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations47

KIJIMA MIHOKO

1 patent

US8788981B2Jul 22, 2014

Method of OPC model building, information-processing apparatus, and method of determining process conditions of semiconductor device

KIJIMA MIHOKO1 citations42

SUKEGAWA SHIGEKI

1 patent

US8552371B2Oct 8, 2013

Method for adjusting imaging magnification and charged particle beam apparatus

SUKEGAWA SHIGEKI0 citations40