Inventor
FLOYD KIRBY H
US7 patents
⚠️ This page may combine multiple inventors who share the name “FLOYD KIRBY H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS9922819B2Mar 20, 2018
Wafer rotation in a semiconductor chamber
APPLIED MATERIALS INC2 citations72
US11302520B2Apr 12, 2022
Chamber apparatus for chemical etching of dielectric materials
APPLIED MATERIALS INC1 citations61
US11257693B2Feb 22, 2022
Methods and systems to improve pedestal temperature control
APPLIED MATERIALS INC0 citations50
US12488967B2Dec 2, 2025
Extreme uniformity heated substrate support assembly
APPLIED MATERIALS INC0 citations48