Inventor

KIYAMA HIDEKAZU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “KIYAMA HIDEKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US9082800B2Jul 14, 2015

Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium

TOKYO ELECTRON LTD2 citations61

US12077392B2Sep 3, 2024

Substrate transfer apparatus and substrate transfer method

TOKYO ELECTRON LTD1 citations54

US11257701B2Feb 22, 2022

Substrate processing apparatus, substrate processing method and recording medium

TOKYO ELECTRON LTD1 citations50

ENOKIDA SUGURU

1 patent

US8985929B2Mar 24, 2015

Substrate processing apparatus, substrate processing method and storage medium

ENOKIDA SUGURU7 citations77