Inventor
ISHIMARU KAZUTOSHI
JP5 patents
Patents
5 patentsUS6973370B2Dec 6, 2005
Substrate processing apparatus and method for adjusting a substrate transfer position
TOKYO ELECTRON LTD23 citations91
US10840213B2Nov 17, 2020
Bonding system
TOKYO ELECTRON LTD7 citations78
US10879100B2Dec 29, 2020
Substrate transfer device, substrate transfer method and recording medium
TOKYO ELECTRON LTD4 citations69
US10424502B2Sep 24, 2019
Substrate transfer device and bonding system
TOKYO ELECTRON LTD4 citations69
US11257701B2Feb 22, 2022
Substrate processing apparatus, substrate processing method and recording medium
TOKYO ELECTRON LTD1 citations50