Inventor
SU TSU-HUI
TW13 patents
Patents
13 patentsUS11158726B2Oct 26, 2021
Controlling fin-thinning through feedback
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12176422B2Dec 24, 2024
Controlling fin-thinning through feedback
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11923437B2Mar 5, 2024
Controlling fin-thinning through feedback
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US9401434B2Jul 26, 2016
E-flash cell band engineering for erasing speed enhancement
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US12439643B2Oct 7, 2025
Fin shape modification
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12191380B2Jan 7, 2025
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11424347B2Aug 23, 2022
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12575121B2Mar 10, 2026
Reducing fin wriggling in fin-thinning process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10777649B2Sep 15, 2020
Silicon nano-tip thin film for flash memory cells
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9634105B2Apr 25, 2017
Silicon nano-tip thin film for flash memory cells
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9577077B2Feb 21, 2017
Well controlled conductive dot size in flash memory
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10497560B2Dec 3, 2019
Uniformity control for Si dot size in flash memory
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
US9929007B2Mar 27, 2018
e-Flash Si dot nitrogen passivation for trap reduction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41