Inventor
CHEN LUCY
US4 patents
⚠️ This page may combine multiple inventors who share the name “CHEN LUCY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS10544505B2Jan 28, 2020
Deposition or treatment of diamond-like carbon in a plasma reactor
APPLIED MATERIALS INC12 citations85
US10249495B2Apr 2, 2019
Diamond like carbon layer formed by an electron beam plasma process
APPLIED MATERIALS INC17 citations85
US9852923B2Dec 26, 2017
Mask etch for patterning
APPLIED MATERIALS INC2 citations70