Inventor
GERARD RENE
FR4 patents
Patents
4 patentsUS3950095AApr 13, 1976
Positioning device for a flat rectangular workpiece
THOMSON CSF33 citations89
US4226569AOct 7, 1980
Wafer loading and positioning device
THOMSON CSF27 citations80
US4171162AOct 16, 1979
System for positioning an object in an optical projection system
THOMSON CSF28 citations80
US4140392AFeb 20, 1979
Optical system for projecting patterns comprising a constant-magnification focusing servocontrol
THOMSON CSF21 citations80