Inventor

HEINTEL WILLI

DE9 patents

⚠️ This page may combine multiple inventors who share the name “HEINTEL WILLI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

3 patents

US7760327B2Jul 20, 2010

Reflecting optical element with eccentric optical passageway

ZEISS CARL SMT AG8 citations82

US7448763B2Nov 11, 2008

Optical subassembly and projection objective in semiconductor lithography

ZEISS CARL SMT AG7 citations70

US7859641B2Dec 28, 2010

Optical element module

ZEISS CARL SMT AG3 citations56

ZEISS CARL SMT GMBH

3 patents

US10663873B2May 26, 2020

Mirror arrangement for microlithographic projection exposure apparatus and related method

ZEISS CARL SMT GMBH2 citations71

US9658542B2May 23, 2017

Optical element

ZEISS CARL SMT GMBH4 citations71

US10133183B2Nov 20, 2018

Optical component

ZEISS CARL SMT GMBH0 citations45

SCHAFFER DIRK

1 patent

US9134501B2Sep 15, 2015

Optical element unit and method of supporting an optical element

SCHAFFER DIRK7 citations79

HEINTEL WILLI

1 patent

US8441747B2May 14, 2013

Optical module with minimized overrun of the optical element

HEINTEL WILLI6 citations65

METHE HEIKO

1 patent

US8305701B2Nov 6, 2012

Connecting arrangement for an optical device

METHE HEIKO1 citations35