Inventor

SRIRAMAN HARI PATHANGI

BE4 patents

⚠️ This page may combine multiple inventors who share the name “SRIRAMAN HARI PATHANGI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US10359706B1Jul 23, 2019

Integrated scanning electron microscopy and optical analysis techniques for advanced process control

KLA TENCOR CORP7 citations76

US10679333B2Jun 9, 2020

Defect detection, classification, and process window control using scanning electron microscope metrology

KLA TENCOR CORP1 citations56

SRIRAMAN HARI PATHANGI

1 patent

US8338296B2Dec 25, 2012

Method for forming a catalyst suitable for growth of carbon nanotubes

SRIRAMAN HARI PATHANGI3 citations54

ASM IP HOLDING BV

1 patent

US10551741B2Feb 4, 2020

Method of forming a directed self-assembled layer on a substrate

ASM IP HOLDING BV0 citations50