P

Inventor

CHUNG PING-CHUNG

TW9 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG PING-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNITED MICROELECTRONICS CORP

5 patents
US6303939B1Oct 16, 2001

Wafer mapping apparatus

UNITED MICROELECTRONICS CORP26 citations91
US6210754B1Apr 3, 2001

Method of adjusting for parallel alignment between a shower head and a heater platform in a chamber used in integrated circuit fabrication

UNITED MICROELECTRONICS CORP55 citations91
US6217640B1Apr 17, 2001

Exhaust gas treatment apparatus

UNITED MICROELECTRONICS CORP28 citations88
US6218320B1Apr 17, 2001

Method for improving the uniformity of wafer-to-wafer film thickness

UNITED MICROELECTRONICS CORP8 citations66
US6569253B2May 27, 2003

Method of cleaning a chamber of a CVD machine and elements within

UNITED MICROELECTRONICS CORP0 citations42

NAT SCIENCE COUNCIL

1 patent
US6011402AJan 4, 2000

Electro-optic apparatus and method for measuring electric-field vector

NAT SCIENCE COUNCIL14 citations67

UTEK SEMICONDUCTOR CORP

1 patent
US6315834B1Nov 13, 2001

Method for removing extraneous matter by using fluorine-containing solution

UTEK SEMICONDUCTOR CORP1 citations45

IND TECH RES INST

1 patent
US7572320B2Aug 11, 2009

Method and apparatus for removing high concentration ozone from a waste gas steam

IND TECH RES INST0 citations42

ZHONG BING-TANG

1 patent
US9149392B2Oct 6, 2015

Casting apparatus

ZHONG BING-TANG0 citations34