Inventor

LAKNER HUBERT KARL

DE2 patents

⚠️ This page may combine multiple inventors who share the name “LAKNER HUBERT KARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICRONIC LASER SYSTEMS AB

1 patent

US6624880B2Sep 23, 2003

Method and apparatus for microlithography

MICRONIC LASER SYSTEMS AB54 citations94

MICRONIC LASERSYSTEMS AB

1 patent

US6885493B2Apr 26, 2005

Method and a device for reducing hysteresis or imprinting in a movable micro-element

MICRONIC LASERSYSTEMS AB135 citations93