Inventor

PELLEMANS HENRICUS PETRUS MARI

NL3 patents

⚠️ This page may combine multiple inventors who share the name “PELLEMANS HENRICUS PETRUS MARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7002667B2Feb 21, 2006

Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV15 citations82

US6995831B2Feb 7, 2006

Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure

ASML NETHERLANDS BV8 citations72

ASML NETHERLANDS

1 patent

US7403293B2Jul 22, 2008

Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing method

ASML NETHERLANDS15 citations78