Inventor

MIFUNE AKITO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “MIFUNE AKITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

2 patents

US5409540AApr 25, 1995

Chemical vapor phase growth method and chemical vapor phase growth apparatus

FUJITSU LTD5 citations56

US5298278AMar 29, 1994

Chemical vapor phase growth method and chemical vapor phase growth apparatus

FUJITSU LTD1 citations46

SPANSION LLC

1 patent

US7908025B2Mar 15, 2011

Semiconductor manufacturing apparatus and control system and control method therefor

SPANSION LLC2 citations60

MIWA KAZUHIRO

1 patent

US8577494B2Nov 5, 2013

Semiconductor manufacturing apparatus and control system and control method therefor

MIWA KAZUHIRO1 citations44