Inventor
LIU CHIN-YI
US3 patents
Patents
3 patentsUS10923379B2Feb 16, 2021
Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure
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Universal non-invasive chamber impedance measurement system and associated methods
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US9790582B2Oct 17, 2017
Long lifetime thermal spray coating for etching or deposition chamber application
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