P

Inventor

GOPALAKRISHNAN PADMA

US7 patents
⚠️ This page may combine multiple inventors who share the name “GOPALAKRISHNAN PADMA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents
US9227297B2Jan 5, 2016

Retaining ring with attachable segments

APPLIED MATERIALS INC9 citations79
US9481608B2Nov 1, 2016

Surface annealing of components for substrate processing chambers

APPLIED MATERIALS INC4 citations72
US9168631B2Oct 27, 2015

Two-part retaining ring with interlock features

APPLIED MATERIALS INC2 citations56
US9960019B2May 1, 2018

Life enhancement of ring assembly in semiconductor manufacturing chambers

APPLIED MATERIALS INC0 citations46

LAM RES CORP

1 patent
US10923379B2Feb 16, 2021

Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure

LAM RES CORP41 citations88

BHATNAGAR ASHISH

1 patent
US8617672B2Dec 31, 2013

Localized surface annealing of components for substrate processing chambers

BHATNAGAR ASHISH23 citations88

ARUN SANDHYA

1 patent
US8740206B2Jun 3, 2014

Life enhancement of ring assembly in semiconductor manufacturing chambers

ARUN SANDHYA7 citations73