Inventor
BEVAN MALCOLM
US5 patents
Patents
5 patentsUS9831091B2Nov 28, 2017
Plasma treating a process chamber
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Thin film treatment process
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Method and apparatus for selective nitridation process
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US10290504B2May 14, 2019
Plasma treating a process chamber
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US12354843B2Jul 8, 2025
Process chamber process kit with protective coating
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