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Inventor
BYRNS BRANDON
US
2 patents
⚠️ This page may combine multiple inventors who share the name “BYRNS BRANDON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
1 patent
US11049700B2
Jun 29, 2021
Atmospheric plasma processing systems and methods for manufacture of microelectronic workpieces
TOKYO ELECTRON LTD
2 citations
69
UNIV NORTH CAROLINA STATE
1 patent
US9475710B2
Oct 25, 2016
Very high frequency (VHF) driven atmospheric plasma sources and point of use fertigation of irrigation water utilizing plasma production of nitrogen bearing species
UNIV NORTH CAROLINA STATE
2 citations
51