Inventor
STEFFEN KATJA
DE4 patents
⚠️ This page may combine multiple inventors who share the name “STEFFEN KATJA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HEINRICH JENS
2 patentsUS8138038B2Mar 20, 2012
Superior fill conditions in a replacement gate approach by performing a polishing process based on a sacrificial fill material
HEINRICH JENS8 citations81
US8338306B2Dec 25, 2012
Forming semiconductor resistors in a semiconductor device comprising metal gates by increasing etch resistivity of the resistors
HEINRICH JENS2 citations59