Inventor
GURARY ALEX
US10 patents
⚠️ This page may combine multiple inventors who share the name “GURARY ALEX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GURARY ALEX
5 patentsUS8895107B2Nov 25, 2014
Chemical vapor deposition with elevated temperature gas injection
GURARY ALEX6 citations82
US8460466B2Jun 11, 2013
Exhaust for CVD reactor
GURARY ALEX12 citations82
US8603248B2Dec 10, 2013
System and method for varying wafer surface temperature via wafer-carrier temperature offset
GURARY ALEX9 citations80
US8937000B2Jan 20, 2015
Chemical vapor deposition with elevated temperature gas injection
GURARY ALEX4 citations71
US9324590B2Apr 26, 2016
Processing methods and apparatus with temperature distribution control
GURARY ALEX0 citations51
MITROVIC BOJAN
4 patentsUS8287646B2Oct 16, 2012
Gas treatment systems
MITROVIC BOJAN16 citations91
US8152923B2Apr 10, 2012
Gas treatment systems
MITROVIC BOJAN21 citations91
US9273395B2Mar 1, 2016
Gas treatment systems
MITROVIC BOJAN2 citations61
US8980000B2Mar 17, 2015
Density-matching alkyl push flow for vertical flow rotating disk reactors
MITROVIC BOJAN2 citations61