Inventor
WILBARG ROBERT R
US5 patents
Patents
5 patentsUS5296408AMar 22, 1994
Fabrication method for vacuum microelectronic devices
IBM53 citations92
US4115120ASep 19, 1978
Method of forming thin film patterns by differential pre-baking of resist
IBM41 citations86
US5043586AAug 27, 1991
Planarized, reusable calibration grids
IBM19 citations80
US4229233AOct 21, 1980
Method for fabricating non-reflective semiconductor surfaces by anisotropic reactive ion etching
IBM22 citations79
US5169488ADec 8, 1992
Method of forming planarized, reusable calibration grids
IBM16 citations71