Inventor
EGUCHI KOUHEI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “EGUCHI KOUHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIPPON STEEL CORP
6 patentsUS5192087AMar 9, 1993
Device for supporting a wafer
NIPPON STEEL CORP59 citations93
US5329335AJul 12, 1994
Method and apparatus for projection exposure
NIPPON STEEL CORP27 citations92
US5238865AAug 24, 1993
Process for producing laminated semiconductor substrate
NIPPON STEEL CORP46 citations91
US5185286AFeb 9, 1993
Process for producing laminated semiconductor substrate
NIPPON STEEL CORP23 citations91
US5396120AMar 7, 1995
Semiconductor integrated unit
NIPPON STEEL CORP9 citations73
US5580824ADec 3, 1996
Method for fabrication of interconnections in semiconductor devices
NIPPON STEEL CORP6 citations61