Inventor
CHANG YUH-HWA
TW12 patents
⚠️ This page may combine multiple inventors who share the name “CHANG YUH-HWA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
10 patentsUS6841081B2Jan 11, 2005
Method for manufacturing reflective spatial light modulator mirror devices
TAIWAN SEMICONDUCTOR MFG159 citations98
US6929969B2Aug 16, 2005
Reflective spatial light modulator mirror device manufacturing process and layout method
TAIWAN SEMICONDUCTOR MFG7 citations73
US6958249B1Oct 25, 2005
Method to monitor process charging effect
TAIWAN SEMICONDUCTOR MFG10 citations72
US6947196B2Sep 20, 2005
Trench-embedded mirror structure for double substrate spatial light modulator
TAIWAN SEMICONDUCTOR MFG7 citations72
US7057794B2Jun 6, 2006
Micromirror for MEMS device
TAIWAN SEMICONDUCTOR MFG9 citations71
US7205176B2Apr 17, 2007
Surface MEMS mirrors with oxide spacers
TAIWAN SEMICONDUCTOR MFG5 citations60
US7838427B2Nov 23, 2010
Method for planarization
TAIWAN SEMICONDUCTOR MFG1 citations50
US7153768B2Dec 26, 2006
Backside coating for MEMS wafer
TAIWAN SEMICONDUCTOR MFG0 citations50
US7095544B2Aug 22, 2006
Micromirror and products using the same
TAIWAN SEMICONDUCTOR MFG1 citations49
US7384799B2Jun 10, 2008
Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices
TAIWAN SEMICONDUCTOR MFG0 citations43