Inventor
SO JOSEPH K
US13 patents
⚠️ This page may combine multiple inventors who share the name “SO JOSEPH K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ROHM & HAAS ELECT MAT
7 patentsUS6893328B2May 17, 2005
Conductive polishing pad with anode and cathode
ROHM & HAAS ELECT MAT71 citations97
US7387964B2Jun 17, 2008
Copper polishing cleaning solution
ROHM & HAAS ELECT MAT24 citations92
US6769968B2Aug 3, 2004
Interchangeable conditioning disk apparatus
ROHM & HAAS ELECT MAT14 citations83
US7303993B2Dec 4, 2007
Chemical mechanical polishing compositions and methods relating thereto
ROHM & HAAS ELECT MAT9 citations71
US7084059B2Aug 1, 2006
CMP system for metal deposition
ROHM & HAAS ELECT MAT6 citations62
US7384871B2Jun 10, 2008
Chemical mechanical polishing compositions and methods relating thereto
ROHM & HAAS ELECT MAT3 citations60
US8357446B2Jan 22, 2013
Hollow polymeric-silicate composite
ROHM & HAAS ELECT MAT0 citations35
RODEL INC
4 patentsUS6749485B1Jun 15, 2004
Hydrolytically stable grooved polishing pads for chemical mechanical planarization
RODEL INC98 citations97
US6736709B1May 18, 2004
Grooved polishing pads for chemical mechanical planarization
RODEL INC96 citations97
US6475069B1Nov 5, 2002
Control of removal rates in CMP
RODEL INC21 citations92
US6530824B2Mar 11, 2003
Method and composition for polishing by CMP
RODEL INC15 citations80