Inventor

XIA ANNIE

US2 patents

⚠️ This page may combine multiple inventors who share the name “XIA ANNIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

1 patent

US7172969B2Feb 6, 2007

Method and system for etching a film stack

IBM13 citations80

TOKYO ELECTRON LTD

1 patent

US7361608B2Apr 22, 2008

Method and system for forming a feature in a high-k layer

TOKYO ELECTRON LTD2 citations60