P

Inventor

LI LEPING

US94 patents
⚠️ This page may combine multiple inventors who share the name “LI LEPING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

35 patents
US5559428ASep 24, 1996

In-situ monitoring of the change in thickness of films

IBM258 citations99
US6072313AJun 6, 2000

In-situ monitoring and control of conductive films by detecting changes in induced eddy currents

IBM163 citations98
US5731697AMar 24, 1998

In-situ monitoring of the change in thickness of films

IBM108 citations98
US5660672AAug 26, 1997

In-situ monitoring of conductive films on semiconductor wafers

IBM155 citations98
US5644221AJul 1, 1997

Endpoint detection for chemical mechanical polishing using frequency or amplitude mode

IBM135 citations98
US6126848AOct 3, 2000

Indirect endpoint detection by chemical reaction and chemiluminescence

IBM485 citations97
US5659492AAug 19, 1997

Chemical mechanical polishing endpoint process control

IBM60 citations96
US5220405AJun 15, 1993

Interferometer for in situ measurement of thin film thickness changes

IBM65 citations96
US6213846B1Apr 10, 2001

Real-time control of chemical-mechanical polishing processes using a shaft distortion measurement

IBM37 citations93
US6276987B1Aug 21, 2001

Chemical mechanical polishing endpoint process control

IBM32 citations92
US6228280B1May 8, 2001

Endpoint detection by chemical reaction and reagent

IBM51 citations92
US5582746ADec 10, 1996

Real time measurement of etch rate during a chemical etching process

IBM19 citations92
US5573624ANov 12, 1996

Chemical etch monitor for measuring film etching uniformity during a chemical etching process

IBM26 citations92
US5501766AMar 26, 1996

Minimizing overetch during a chemical etching process

IBM26 citations92
US5456788AOct 10, 1995

Method and apparatus for contactless real-time in-situ monitoring of a chemical etching process

IBM25 citations92
US5445705AAug 29, 1995

Method and apparatus for contactless real-time in-situ monitoring of a chemical etching process

IBM22 citations92
US5392124AFeb 21, 1995

Method and apparatus for real-time, in-situ endpoint detection and closed loop etch process control

IBM52 citations92
US5386121AJan 31, 1995

In situ, non-destructive CVD surface monitor

IBM24 citations92
US5381234AJan 10, 1995

Method and apparatus for real-time film surface detection for large area wafers

IBM36 citations92
US5338390AAug 16, 1994

Contactless real-time in-situ monitoring of a chemical etching process

IBM32 citations92
US5788801AAug 4, 1998

Real time measurement of etch rate during a chemical etching process

IBM49 citations91
US5516399AMay 14, 1996

Contactless real-time in-situ monitoring of a chemical etching

IBM40 citations91
US5770948AJun 23, 1998

Rotary signal coupling for chemical mechanical polishing endpoint detection with a strasbaugh tool

IBM36 citations88
US5663637ASep 2, 1997

Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool

IBM41 citations87
US6254453B1Jul 3, 2001

Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD system

IBM17 citations83
US5573623ANov 12, 1996

Apparatus for contactless real-time in-situ monitoring of a chemical etching process

IBM7 citations74
US5480511AJan 2, 1996

Method for contactless real-time in-situ monitoring of a chemical etching process

IBM13 citations74
US5451289ASep 19, 1995

Fixture for in-situ noncontact monitoring of wet chemical etching with passive wafer restraint

IBM15 citations74
US6878629B1Apr 12, 2005

Method for detecting CMP endpoint in acidic slurries

IBM8 citations73
US6261851B1Jul 17, 2001

Optimization of CMP process by detecting of oxide/nitride interface using IR system

IBM12 citations73
US6228769B1May 8, 2001

Endpoint detection by chemical reaction and photoionization

IBM8 citations73
US6180422B1Jan 30, 2001

Endpoint detection by chemical reaction

IBM5 citations73
US6066564AMay 23, 2000

Indirect endpoint detection by chemical reaction

IBM12 citations73
US5500073AMar 19, 1996

Real time measurement of etch rate during a chemical etching process

IBM15 citations73
US5489361AFeb 6, 1996

Measuring film etching uniformity during a chemical etching process

IBM15 citations73

ABBOTT LAB

5 patents

AMGEN INC

3 patents

TULARIK INC

2 patents

UNIV NORTH CAROLINA

1 patent

ASSEMBLY BIOSCIENCES INC

1 patent

PRESIDIO PHARMACEUTICALS INC

1 patent

ECOPHYSICS AG

1 patent

LI LEPING

1 patent

Showing the top 50 of 94 patents by PatentIndex Score.