Inventor
LI LEPING
US94 patents
⚠️ This page may combine multiple inventors who share the name “LI LEPING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
35 patentsUS5559428ASep 24, 1996
In-situ monitoring of the change in thickness of films
IBM258 citations99
US6072313AJun 6, 2000
In-situ monitoring and control of conductive films by detecting changes in induced eddy currents
IBM163 citations98
US5731697AMar 24, 1998
In-situ monitoring of the change in thickness of films
IBM108 citations98
US5660672AAug 26, 1997
In-situ monitoring of conductive films on semiconductor wafers
IBM155 citations98
US5644221AJul 1, 1997
Endpoint detection for chemical mechanical polishing using frequency or amplitude mode
IBM135 citations98
US6126848AOct 3, 2000
Indirect endpoint detection by chemical reaction and chemiluminescence
IBM485 citations97
US5659492AAug 19, 1997
Chemical mechanical polishing endpoint process control
IBM60 citations96
US5220405AJun 15, 1993
Interferometer for in situ measurement of thin film thickness changes
IBM65 citations96
US6213846B1Apr 10, 2001
Real-time control of chemical-mechanical polishing processes using a shaft distortion measurement
IBM37 citations93
US6276987B1Aug 21, 2001
Chemical mechanical polishing endpoint process control
IBM32 citations92
US6228280B1May 8, 2001
Endpoint detection by chemical reaction and reagent
IBM51 citations92
US5582746ADec 10, 1996
Real time measurement of etch rate during a chemical etching process
IBM19 citations92
US5573624ANov 12, 1996
Chemical etch monitor for measuring film etching uniformity during a chemical etching process
IBM26 citations92
US5501766AMar 26, 1996
Minimizing overetch during a chemical etching process
IBM26 citations92
US5456788AOct 10, 1995
Method and apparatus for contactless real-time in-situ monitoring of a chemical etching process
IBM25 citations92
US5445705AAug 29, 1995
Method and apparatus for contactless real-time in-situ monitoring of a chemical etching process
IBM22 citations92
US5392124AFeb 21, 1995
Method and apparatus for real-time, in-situ endpoint detection and closed loop etch process control
IBM52 citations92
US5386121AJan 31, 1995
In situ, non-destructive CVD surface monitor
IBM24 citations92
US5381234AJan 10, 1995
Method and apparatus for real-time film surface detection for large area wafers
IBM36 citations92
US5338390AAug 16, 1994
Contactless real-time in-situ monitoring of a chemical etching process
IBM32 citations92
US5788801AAug 4, 1998
Real time measurement of etch rate during a chemical etching process
IBM49 citations91
US5516399AMay 14, 1996
Contactless real-time in-situ monitoring of a chemical etching
IBM40 citations91
US5770948AJun 23, 1998
Rotary signal coupling for chemical mechanical polishing endpoint detection with a strasbaugh tool
IBM36 citations88
US5663637ASep 2, 1997
Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool
IBM41 citations87
US6254453B1Jul 3, 2001
Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD system
IBM17 citations83
US5573623ANov 12, 1996
Apparatus for contactless real-time in-situ monitoring of a chemical etching process
IBM7 citations74
US5480511AJan 2, 1996
Method for contactless real-time in-situ monitoring of a chemical etching process
IBM13 citations74
US5451289ASep 19, 1995
Fixture for in-situ noncontact monitoring of wet chemical etching with passive wafer restraint
IBM15 citations74
US6878629B1Apr 12, 2005
Method for detecting CMP endpoint in acidic slurries
IBM8 citations73
US6261851B1Jul 17, 2001
Optimization of CMP process by detecting of oxide/nitride interface using IR system
IBM12 citations73
US6228769B1May 8, 2001
Endpoint detection by chemical reaction and photoionization
IBM8 citations73
US6180422B1Jan 30, 2001
Endpoint detection by chemical reaction
IBM5 citations73
US6066564AMay 23, 2000
Indirect endpoint detection by chemical reaction
IBM12 citations73
US5500073AMar 19, 1996
Real time measurement of etch rate during a chemical etching process
IBM15 citations73
US5489361AFeb 6, 1996
Measuring film etching uniformity during a chemical etching process
IBM15 citations73
ABBOTT LAB
5 patentsUS5440056AAug 8, 1995
9-deoxotaxane compounds
ABBOTT LAB111 citations96
US6075011AJun 13, 2000
6-O-substituted erythromycin compounds and method for making same
ABBOTT LAB30 citations92
US6046171AApr 4, 2000
6,11-bridged erythromycin derivatives
ABBOTT LAB56 citations92
US5616740AApr 1, 1997
Process for making 9-deoxotaxane compounds
ABBOTT LAB25 citations91
US5696084ADec 9, 1997
Amino-lipopetide antifungal agents
ABBOTT LAB37 citations88
AMGEN INC
3 patentsTULARIK INC
2 patentsUNIV NORTH CAROLINA
1 patentASSEMBLY BIOSCIENCES INC
1 patentPRESIDIO PHARMACEUTICALS INC
1 patentECOPHYSICS AG
1 patentLI LEPING
1 patentShowing the top 50 of 94 patents by PatentIndex Score.