Inventor
CHEN TAO-HSIN
TW6 patents
Patents
6 patentsUS11150564B1Oct 19, 2021
EUV wafer defect improvement and method of collecting nonconductive particles
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US12292695B2May 6, 2025
EUV wafer defect improvement and method of collecting nonconductive particles
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12032303B2Jul 9, 2024
EUV wafer defect improvement and method of collecting nonconductive particles
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11740564B2Aug 29, 2023
Lithography apparatus and method using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10663871B2May 26, 2020
Reticle stage and method for using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US11221562B2Jan 11, 2022
Reticle and method of detecting intactness of reticle stage using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50