Inventor
HANSON KYLE MORAN
US5 patents
Patents
5 patentsUS10240248B2Mar 26, 2019
Adaptive electric field shielding in an electroplating processor using agitator geometry and motion control
APPLIED MATERIALS INC1 citations58
US10191379B2Jan 29, 2019
Removing photoresist from a wafer
APPLIED MATERIALS INC0 citations50
US10840104B2Nov 17, 2020
Controlled etch of nitride features
APPLIED MATERIALS INC0 citations49
US9864283B2Jan 9, 2018
Apparatus and methods for photomask backside cleaning
APPLIED MATERIALS INC1 citations46
US11551942B2Jan 10, 2023
Methods and apparatus for cleaning a substrate after processing
APPLIED MATERIALS INC0 citations42