Inventor
JOSHI MAHADEV
IN4 patents
Patents
4 patentsUS9799548B2Oct 24, 2017
Susceptors for enhanced process uniformity and reduced substrate slippage
APPLIED MATERIALS INC9 citations81
US12094740B2Sep 17, 2024
Automated dry-in dry-out dual side polishing of silicon substrates with integrated spin rinse dry and metrology
APPLIED MATERIALS INC0 citations52
US12504269B2Dec 23, 2025
Self-aligning interferometric end point housing
APPLIED MATERIALS INC0 citations46
US11551942B2Jan 10, 2023
Methods and apparatus for cleaning a substrate after processing
APPLIED MATERIALS INC0 citations42