Inventor
STEVENS JOE
US10 patents
Patents
10 patentsUS6251236B1Jun 26, 2001
Cathode contact ring for electrochemical deposition
APPLIED MATERIALS INC364 citations98
US6416647B1Jul 9, 2002
Electro-chemical deposition cell for face-up processing of single semiconductor substrates
APPLIED MATERIALS INC476 citations97
US6228233B1May 8, 2001
Inflatable compliant bladder assembly
APPLIED MATERIALS INC291 citations97
US6516815B1Feb 11, 2003
Edge bead removal/spin rinse dry (EBR/SRD) module
APPLIED MATERIALS INC332 citations96
US6267853B1Jul 31, 2001
Electro-chemical deposition system
APPLIED MATERIALS INC211 citations96
US5810931ASep 22, 1998
High aspect ratio clamp ring
APPLIED MATERIALS INC78 citations95
US5993170ANov 30, 1999
Apparatus and method for compressing high purity gas
APPLIED MATERIALS INC26 citations90
US6599402B2Jul 29, 2003
Electro-chemical deposition cell for face-up processing of single semiconductor substrates
APPLIED MATERIALS INC13 citations82
US6475357B2Nov 5, 2002
Inflatable compliant bladder assembly
APPLIED MATERIALS INC5 citations71
US5990453ANov 23, 1999
High pressure/high temperature process chamber
APPLIED MATERIALS INC7 citations64