Inventor

SHIMAMOTO IKUO

JP3 patents

Patents

3 patents

US6872260B2Mar 29, 2005

Deposited-film forming apparatus

NEOMAX CO LTD6 citations70

US7056197B2Jun 6, 2006

Dry surface treating apparatus and dry surface treating method using the same apparatus

NEOMAX CO LTD2 citations59

US6960368B2Nov 1, 2005

Deposited-film forming apparatus

NEOMAX CO LTD3 citations59