Inventor
DOWNEY DANIEL F
US8 patents
⚠️ This page may combine multiple inventors who share the name “DOWNEY DANIEL F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
5 patentsUS6087247AJul 11, 2000
Method for forming shallow junctions in semiconductor wafers using controlled, low level oxygen ambients during annealing
VARIAN SEMICONDUCTOR EQUIPMENT21 citations91
US6069062AMay 30, 2000
Methods for forming shallow junctions in semiconductor wafers
VARIAN SEMICONDUCTOR EQUIPMENT41 citations91
US7163901B2Jan 16, 2007
Methods for forming thin film layers by simultaneous doping and sintering
VARIAN SEMICONDUCTOR EQUIPMENT16 citations82
US7135423B2Nov 14, 2006
Methods for forming low resistivity, ultrashallow junctions with low damage
VARIAN SEMICONDUCTOR EQUIPMENT16 citations82
US6878415B2Apr 12, 2005
Methods for chemical formation of thin film layers using short-time thermal processes
VARIAN SEMICONDUCTOR EQUIPMENT8 citations72