Inventor

MADER ROLAND

DE3 patents

⚠️ This page may combine multiple inventors who share the name “MADER ROLAND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEAG RTP SYSTEMS GMBH

1 patent

US6614005B1Sep 2, 2003

Device and method for thermally treating substrates

STEAG RTP SYSTEMS GMBH36 citations90

(unassigned)

1 patent

US5935650AAug 10, 1999

Method of oxidation of semiconductor wafers in a rapid thermal processing (RTP) system

22 citations85

MATTSON THERMAL PRODUCTS

1 patent

US7144826B2Dec 5, 2006

Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment

MATTSON THERMAL PRODUCTS15 citations75