Inventor

PFLANZ TOBIAS

DE3 patents

⚠️ This page may combine multiple inventors who share the name “PFLANZ TOBIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

2 patents

US6618421B2Sep 9, 2003

High repetition rate gas discharge laser with precise pulse timing control

CYMER INC59 citations93

US7149234B2Dec 12, 2006

High repetition rate gas discharge laser with precise pulse timing control

CYMER INC1 citations49

TUILASER AG

1 patent

US6798814B2Sep 28, 2004

Gas discharge laser, method of operating a gas discharge laser, and use of a sintered filter

TUILASER AG3 citations54