P
PatentIndex
Search
Landscape
Sign in
Inventor
HARTMANN CLAUDIA A
DE
2 patents
Patents
2 patents
US6618421B2
Sep 9, 2003
High repetition rate gas discharge laser with precise pulse timing control
CYMER INC
59 citations
93
US7149234B2
Dec 12, 2006
High repetition rate gas discharge laser with precise pulse timing control
CYMER INC
1 citations
49