Inventor
SMITH BRETT D
US9 patents
⚠️ This page may combine multiple inventors who share the name “SMITH BRETT D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
6 patentsUS5936988AAug 10, 1999
High pulse rate pulse power system
CYMER INC154 citations98
US6151346ANov 21, 2000
High pulse rate pulse power system with fast rise time and low current
CYMER INC89 citations97
US6618421B2Sep 9, 2003
High repetition rate gas discharge laser with precise pulse timing control
CYMER INC59 citations93
US6240112B1May 29, 2001
High pulse rate pulse power system with liquid cooling
CYMER INC32 citations92
US6028872AFeb 22, 2000
High pulse rate pulse power system with resonant power supply
CYMER INC53 citations92
US7149234B2Dec 12, 2006
High repetition rate gas discharge laser with precise pulse timing control
CYMER INC1 citations49