P

Inventor

SASAKI YASUHITO

JP12 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI YASUHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

7 patents
US7224432B2May 29, 2007

Stage device, exposure apparatus, and device manufacturing method

CANON KK12 citations84
US7321418B2Jan 22, 2008

Stage apparatus, exposure apparatus, and device manufacturing method

CANON KK11 citations83
US7312848B2Dec 25, 2007

Positioning apparatus, exposure apparatus, and device manufacturing method

CANON KK5 citations62
US7301602B2Nov 27, 2007

Stage apparatus and exposure apparatus

CANON KK5 citations62
US7408276B2Aug 5, 2008

Plane motor device with surrounding member surrounding coil unit and with cooling channel provided within surrounding member

CANON KK1 citations52
US7391495B2Jun 24, 2008

Stage apparatus, exposure system using the same, and device manufacturing method

CANON KK0 citations52
US10495978B2Dec 3, 2019

Projection optical system, exposure apparatus, and device manufacturing method

CANON KK0 citations51

SATO HITOSHI

2 patents
US8102500B2Jan 24, 2012

Stage device, exposure apparatus, and microdevice manufacturing method

SATO HITOSHI3 citations62
US8891054B2Nov 18, 2014

Stage device including a heat insulating sheet supported by an auxiliary member

SATO HITOSHI0 citations51

TOSHIBA KK

1 patent
US4671458AJun 9, 1987

Air conditioning apparatus

TOSHIBA KK56 citations95

MITSUBISHI ELECTRIC CORP

1 patent
US5619495AApr 8, 1997

Cell switching apparatus and a cell switching system

MITSUBISHI ELECTRIC CORP17 citations73

UNIV WASEDA

1 patent
US9944576B2Apr 17, 2018

Method for separating straight-chain conjugated diene

UNIV WASEDA0 citations46